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Positive photoresist for semiconductor lighting

 

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1 Special note:

You will found the specifications of specific model and related test reports in download center.

2 Application:

Specific applications in the field of semiconductor lighting: patterned sapphire substrate (PSS) production; LED chip production etc..

3 Technical parameters:

Main technical parameters of photoresist for semiconductor lighting:

The series of semiconductor lighting mainly include: RD-2000, RD-4000, RD-6000, RD-NL700 series, the main technical parameters of different series of photoresist are as follows:

Items

Series products

Main parameters

1

RD-2000 series

Moisture: <0.5%; particles (0.5um particles, /ml):<100; trace metals (K, Na, Fe, ppb): <300; film thickness: 1.0~3.5um; resolution: 0.8um (g-line)

2

RD-4000 series

Moisture: <0.5%; particles (0.5um particles, /ml):<100; trace metals (K, Na, Fe, ppb): <50; film thickness: 1.0~4.5um; resolution: 0.4um (g-line)

3

RD-6000 series

Moisture: <0.5%; particles (0.5um particles, /ml):<100; trace metals (K, Na, Fe, ppb): <100; film thickness: 3.0~15um; resolution: 0.65um (g-line)

4

RD-NL700 series

Moisture: <0.5%; particles (0.5um particles, /ml):<100; trace metals (K, Na, Fe, ppb): <500; film thickness: 1.8~4.5um; Trapezoidal angle: 45~80 degrees resolution: 1um (g-line)


Main technical parameters of photoresist for semiconductor lighting:

The series of semiconductor lighting mainly include: RD-2000, RD-4000, RD-6000, RD-NL700 series, the main technical parameters of different series of photoresist are as follows:

Items

Series products

Main parameters

1

RD-2000 series

Moisture: <0.5%; particles (0.5um particles, /ml):<100; trace metals (K, Na, Fe, ppb): <300; film thickness: 1.0~3.5um; resolution: 0.8um (g-line)

2

RD-4000 series

Moisture: <0.5%; particles (0.5um particles, /ml):<100; trace metals (K, Na, Fe, ppb): <50; film thickness: 1.0~4.5um; resolution: 0.4um (g-line)

3

RD-6000 series

Moisture: <0.5%; particles (0.5um particles, /ml):<100; trace metals (K, Na, Fe, ppb): <100; film thickness: 3.0~15um; resolution: 0.65um (g-line)

4

RD-NL700 series

Moisture: <0.5%; particles (0.5um particles, /ml):<100; trace metals (K, Na, Fe, ppb): <500; film thickness: 1.8~4.5um; Trapezoidal angle: 45~80 degrees resolution: 1um (g-line)